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Micromachines as tools for nanotechnology

Fujita H Ed.

Micromachines as tools for nanotechnology - Barlin Springer-Verlag 2003 - xii, 211p. cm. - Microtechnology and mems .

Includes bibliographical references

ISBN: 8181282027 (pbk)

Standard No.: 13160

Source: 714, 22/12/2004, Unilib Book Distributors Textual

Subjects--Topical Terms:
Computer Science
Matter
Solid
Physics

Dewey Class. No.: C21:(D), P3

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