Photonic MEMS devices Design, fabrication and control.
Liu Ai-Qun
Photonic MEMS devices Design, fabrication and control. - Boca Raton CRC Press 2009 - 483p. cm. - Optical science and engineering. .
45080
Textual
D65,5:4, P9
Photonic MEMS devices Design, fabrication and control. - Boca Raton CRC Press 2009 - 483p. cm. - Optical science and engineering. .
45080
Textual
D65,5:4, P9
