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Enabling technology for MEMS and Nanodevices.

Baltes H

Enabling technology for MEMS and Nanodevices. - Weinham Wiley 2013 - xii,427p cm.

ISBN: 5954.6000000000004

Standard No.: 119715

Source: 147, 01/10/2013, Classic Book Service Textual

Subjects--Topical Terms:
Electronic Science

Dewey Class. No.: D65152, Q3

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