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Run-to-Run Control in Semiconductor Manufacturing (Record no. 1798597)

MARC details
000 -LEADER
fixed length control field	01001nam a2200277Ia 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field	20260324134805.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field	008 260324s9999 xx 000 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number	9781315220239
037 ## - SOURCE OF ACQUISITION
Stock number	EBOOK
040 ## - CATALOGING SOURCE
Original cataloging agency	CRL
040 ## - CATALOGING SOURCE
Language of cataloging	eng
040 ## - CATALOGING SOURCE
Transcribing agency	CRL
041 ## - LANGUAGE CODE
Source of code	eng
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title	eng
084 ## - COLON CLASSIFICATION NUMBER
Assigning agency	CRL
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name	Chadi El Chemali; Arnon M. Hurwitz; Argon Chen; Ruey-Shan Guo; William Moyne; Nital Patel; Taber H. Smith; Duane Boning; Jin-Jung Chen; Robert A. Soper; Jinn-Yi Yeh; Jonathan Chapple-Sokol; Naumann Chaudhry; John Colt; Rock Nadeau; Tarun Parikh; Elke Rundensteiner; Paul H. Smith; Joe White; Victor Solakhian; James Moyne; Enrique del Castillo; B. Karumullah Khan
9 (RLIN)	1198168
245 #0 - TITLE STATEMENT
Title	Run-to-Run Control in Semiconductor Manufacturing
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc.	Taylor and Francis
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Date of publication, distribution, etc.	2001
365 ## - TRADE PRICE
Price type code
365 ## - TRADE PRICE
Price amount	370
856 ## - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier	<a href="http://www.taylorfrancis.com/books/9781315220239">http://www.taylorfrancis.com/books/9781315220239</a>
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type	eBooks

Holdings
Withdrawn status	Lost status	Damaged status	Not for loan	Home library	Current library	Date acquired	Total Checkouts	Barcode	Date last seen	Price effective from	Koha item type
				Central Library	Central Library	2026-03-24		CL2080762	2026-03-24	2026-03-24	eBooks