Handbook of semiconductor manufacturing technology (Record no. 19521)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01036nam a2200325Ia 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220912144936.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 220909b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781574446753 (hbd) |
| 037 ## - SOURCE OF ACQUISITION | |
| Terms of availability | REF |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | CSL |
| Language of cataloging | eng |
| Transcribing agency | CSL |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Doering Robert Ed. |
| 245 #0 - TITLE STATEMENT | |
| Title | Handbook of semiconductor manufacturing technology |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton |
| Name of publisher, distributor, etc. | CRC Pres |
| Date of publication, distribution, etc. | 2008 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | Various pagination |
| Dimensions | cm. |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references.; Appendix A-D, A1-D8p.; Index I1-I26p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductor industry |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors-design |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Physics |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Nishi Yoshio Ed. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Classification part | C6:212:(F)g, P8 RR |
| Koha item type | Reference |
| Source of classification or shelving scheme | Colon Classification (CC) |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Central Science Library | Central Science Library | 2022-09-12 | 230, 21/10/2008, Ashutosh Technical Books | C6:212:(F)g P8 RR | SL1382338 | 2022-09-12 | 2022-09-12 | Reference |