Normal view
MARC view
Entry Personal Name
001 - CONTROL NUMBER
- control field: 500096
003 - CONTROL NUMBER IDENTIFIER
- control field: OSt
005 - DATE AND TIME OF LATEST TRANSACTION
- control field: 20220928141431.0
008 - FIXED-LENGTH DATA ELEMENTS
- fixed length control field: 220928|| aca||aabn | a|a d
040 ## - CATALOGING SOURCE
- Original cataloging agency: OSt
- Transcribing agency: OSt
100 ## - HEADING--PERSONAL NAME
- Personal name: Sze Simon M
670 ## - SOURCE DATA FOUND
- Source citation: Work cat.: (OSt)817360: May Gary S 500095, Fundamentals semiconductor fabrication., 2004
