Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 954186

003 - CONTROL NUMBER IDENTIFIER

• control field: OSt

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20260121112225.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 260121|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: OSt
• Transcribing agency: OSt

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Materials Science

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (OSt)1541581: Lau Wai Shnig 954185, Ulsi Front-End Technology: Covering from the First Semiconductor Paper to Cmos Finfet Technology