Fundamentals of semiconductor fabrication

By:

May Gary S

Contributor(s):

Sze Simon M

Material type:

TextLanguage: English Publication details: New Jersey John Wiley & Sons, Inc, 2004Description: xiii, 305p. cmISBN:

981253072X (pbk)

Subject(s):

DDC classification:

C6:212, P4;1-;2

Item type:

Textual

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Holdings
Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	Textual	Central Science Library	Central Science Library			C6:212 P4;1-;2 (Browse shelf(Opens below))					Available			SL1379075

Includes bibliographical references.; Appendix A-L, 265-296p.; Index 297-305p.

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