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Precursor chemistry of advanced materials: CVD, ALD and nanoparticles

By: Material type: TextLanguage: English Series: Topics in organometallic chemistry; 9Publication details: Berlin Springer Verlag 2005Description: xv, 213p. cmISBN:
  • 3540016058 (hbd)
Subject(s): DDC classification:
  • E5,8191, P5 TE
Item type: Textbook
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Includes bibliographical references.; Index 211-213p.

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