TY  - BOOK
AU  - Sze S,M
AU  - Sze S,M
TI  - Semiconductor devices: Physics and technology
SN  - 9788126516810 (pbk)
U1  - C6:24, P2;13-;17 
PY  - 2002///
CY  - New Delhi
PB  -  John wiley     
KW  -  Lithography
KW  -  Photonic device
KW  -  Semiconductor device
KW  -  Semiconductor physics
KW  - General Science
ER  -