TY  - BOOK
AU  - Yoshizawa Toru Ed.
TI  - Handbook of optical metrology:principles and applications
SN  - 9780849337604 (hbd)
U1  - C5:fg, P9    Carpa 
PY  - 2009///
CY  - Boca
PB  - Raton CRC Press        
KW  -  Metrology- handbooks
KW  -  Optical measurements- handbooks
KW  - Physics
N1  - Includes bibliographical references.; Index 715- 730p
ER  -