TY  - BOOK
AU  - Lin Yuan Ed.
AU  -  Chen Xin Ed.
TI  - Advanced nano deposition methods:  Chen Xin Ed.    
SN  - 9783527340255 (hbk)
U1  - C21:(D), Q6 Carpa 
PY  - 2016///
CY  - Germany
PB  - Wiley-VCH          
KW  -  Direct writing nanolithography
KW  -  Electron beam evaporation deposition
KW  -  Phase chande materials
KW  - Physics
N1  - Index 305-309p
ER  -