TY  - BOOK
AU  - Hitchon W N G
TI  - Plasma processes for semiconductor fabrication by W N G Hitchon
T2  - Cambridge studies in semiconductor physics and microelectronic engineering; 8
SN  - 0521591759 (hbd)
U1  - C6:212, N9 
PY  - 1999///
CY  - Cambridge
PB  - Cambridge University Press        
KW  -  Conduction
KW  -  Electricity
KW  -  Semiconductors
KW  - Physics
N1  - Glossary 189-204p; Bibliography 205-211p; Index 213-221p; ^n23/CSL/Carpa/99-2000/226^d1999-06-22^mPurchase; ; 99-2000/140^b1999-08-02^c326^d1999-07-30^eLibco Book Distributors; ; 1999-08-09^c1999-08-22^r1999-10-16
ER  -