Makabe Toshiaki <br/><br/>
Plasma electronics:applications in microelectronic device fabrication   Petrovic Zorman     

 - New  York Taylor & Francis         2006 
 - 339p.  cm. 
 - Series in plasma physics .
<br/><br/> Includes bibliographical references; Index 331-339p 
<br/><br/><label>ISBN: </label>0750309768 (hbd)  Rs.6905.54 
<br/><br/><label>Standard No.: </label>77677 
<br/><br/><label>Source: </label> 318, 08/03/2007, Ashutosh Technical Books  Textbook 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Plasma engineering<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C9B580aD65, P6   Carpa