TY  - BOOK
AU  - Makabe Toshiaki
AU  -  Petrovic Zorman
TI  - Plasma electronics:applications in microelectronic device fabrication:  Petrovic Zorman    
T2  - Series in plasma physics
SN  - 0750309768 (hbd)
U1  - C9B580aD65, P6   Carpa 
PY  - 2006///
CY  - New
PB  - York Taylor & Francis       
KW  -  Plasma engineering
KW  - Physics
N1  - Includes bibliographical references; Index 331-339p
ER  -