TY - BOOK AU - Timp Gregory Ed. TI - Nanotechnology SN - 9788132205302 (pbk) U1 - C21, N9;2-;3 Carc PY - 1999/// CY - New PB - Delhi Springer KW - Atom optics KW - Nanometer-scale KW - Conventional lithography N1 - Index 689-696p.; Reprint 2012 ER -