TY  - BOOK
AU  - Timp Gregory Ed.
TI  - Nanotechnology
SN  - 9788132205302 (pbk)
U1  - C21, N9;4-;8 Carc 
PY  - 1999///
CY  - New
PB  - Deli Springer         
KW  -  Atom optics
KW  -  Nanometer-scale
KW  - Conventional lithography
N1  - Index 689-696p.; Reprint 2012
ER  -