Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set <br/><br/>
Marc J. Madou 

 -  Taylor and Francis  2011 
<br/><br/><label>ISBN: </label>9781315274164 
<br/><br/><label>Source: </label>EBOOK 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoscience & Nanotechnology