TY  - BOOK
AU  - Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
TI  - Marc J. Madou
SN  - 9781315274164
PB  - Taylor and Francis
KW  - Nanoscience & Nanotechnology
UR  - http://www.taylorfrancis.com/books/9781315274164
ER  -