Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon <br/><br/>
Krishna Seshan 

 -  Taylor and Francis  2002 
<br/><br/><label>ISBN: </label>9780429076749 
<br/><br/><label>Source: </label>EBOOK 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials Science