TY  - BOOK
AU  - Seongbo Shim, Youngsoo Shin
TI  - Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
SN  - 9783319762944
PB  - Springer
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-76294-4
ER  -