TY  - BOOK
AU  - Jahns Jugen; Helfert Stefan
AU  - Jahns Jugen; Helfert Stefan
TI  - Introduction to micro and nanooptics
T2  - Physics Textbook
SN  - 9783527408917 (pbk)
U1  - C51, Q2 TC 
PY  - 2012///
CY  - Weinheim
PB  - Wiley       
KW  -  Micro and nanooptics
KW  -  Microlithography
KW  -  Nanodevices
KW  - Physics
N1  - Include bibliographical references.; Index 423425p
ER  -