TY  - BOOK
AU  - Gordon Shaw III; Barton C. Prorok; LaVern Starman; Cosme Furlong
TI  - MEMS and Nanotechnology, Volume 5
SN  - 9788743802532
PB  - Taylor and Francis
UR  - http://www.taylorfrancis.com/books/9788743802532
ER  -