Tatsuhiro Yabune; Takashi Imaoka; Hiroto Izumi; Akinobu Teramoto; Masafumi Kitano; Hiroshi Sugawara; Masaaki Nagase; Nobukazu Ikeda; Koji Nishino; Masayuki Miyashita; Hirohisa Kikuyama; Jun Takano; Hiroshi Morita; Ikunori Yokoi; Nobuhiko Inoue; Senri Ojima; Kenichi Mitsumori; Tadahiro Ohmi; Hitoshi Morinaga <br/><br/>
Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing 

 -  Taylor and Francis  2005 
<br/><br/><label>ISBN: </label>9781315221076 
<br/><br/><label>Source: </label>EBOOK