Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing - Tatsuhiro Yabune; Takashi Imaoka; Hiroto Izumi; Akinobu Teramoto; Masafumi Kitano; Hiroshi Sugawara; Masaaki Nagase; Nobukazu Ikeda; Koji Nishino; Masayuki Miyashita; Hirohisa Kikuyama; Jun Takano; Hiroshi Morita; Ikunori Yokoi; Nobuhiko Inoue; Senri Ojima; Kenichi Mitsumori; Tadahiro Ohmi; Hitoshi Morinaga (Taylor and Francis, 2005)