TY  - BOOK
AU  - Tatsuhiro Yabune; Takashi Imaoka; Hiroto Izumi; Akinobu Teramoto; Masafumi Kitano; Hiroshi Sugawara; Masaaki Nagase; Nobukazu Ikeda; Koji Nishino; Masayuki Miyashita; Hirohisa Kikuyama; Jun Takano; Hiroshi Morita; Ikunori Yokoi; Nobuhiko Inoue; Senri Ojima; Kenichi Mitsumori; Tadahiro Ohmi; Hitoshi Morinaga
TI  - Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing
SN  - 9781315221076
PB  - Taylor and Francis
UR  - http://www.taylorfrancis.com/books/9781315221076
ER  -