Phan Ngoc Minh; Esashi Masayoshi; Ono Takahito <br/><br/>
Fabrication of Silicon Microprobes for Optical Near-Field Applications 

 -  Taylor and Francis  2002 
<br/><br/><label>ISBN: </label>9781315220215 
<br/><br/><label>Source: </label>EBOOK