TY  - BOOK
AU  - Phan Ngoc Minh; Esashi Masayoshi; Ono Takahito
TI  - Fabrication of Silicon Microprobes for Optical Near-Field Applications
SN  - 9781315220215
PB  - Taylor and Francis
UR  - http://www.taylorfrancis.com/books/9781315220215
ER  -