TY  - BOOK
AU  - Chadi El Chemali; Arnon M. Hurwitz; Argon Chen; Ruey-Shan Guo; William Moyne; Nital Patel; Taber H. Smith; Duane Boning; Jin-Jung Chen; Robert A. Soper; Jinn-Yi Yeh; Jonathan Chapple-Sokol; Naumann Chaudhry; John Colt; Rock Nadeau; Tarun Parikh; Elke Rundensteiner; Paul H. Smith; Joe White; Victor Solakhian; James Moyne; Enrique del Castillo; B. Karumullah Khan
TI  - Run-to-Run Control in Semiconductor Manufacturing
SN  - 9781315220239
PB  - Taylor and Francis
UR  - http://www.taylorfrancis.com/books/9781315220239
ER  -