Sarkar, Jaydeep <br/><br/>
Sputtering Materials for VLSI and Thin Film Devices 

 -  Elsevier  2013 
<br/><br/><label>ISBN: </label>9780815515937 
<br/><br/><label>Source: </label>EBOOK 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering