Posseme, Nicolas <br/><br/>
Plasma Etching Processes for Interconnect Realization in VLSI 

 -  Elsevier  2015 
<br/><br/><label>ISBN: </label>9781785480157 
<br/><br/><label>Source: </label>EBOOK 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering