Lindroos, Veikko <br/><br/>
Handbook of Silicon Based MEMS Materials and Technologies 

 -  Elsevier  2015 
<br/><br/><label>ISBN: </label>9780323299657 
<br/><br/><label>Source: </label>EBOOK 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials Science