Posseme, Nicolas <br/><br/>
Plasma Etching Processes for CMOS Devices Realization 

 -  Elsevier  2017 
<br/><br/><label>ISBN: </label>9781785480966 
<br/><br/><label>Source: </label>EBOOK 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials Science