TY  - BOOK
AU  - Taniguchi Norio Ed.
TI  - Nanotechnology:integrated processing systems for ultra-precision ultra-fine products
SN  - 0195693272 (pbk)
U1  - C21:(D), N6 
PY  - 1996///
CY  - New Delhi
PB  - Oxford University Press    
KW  -  Nanotechnology
KW  - Physics
N1  - Includes bibliographical references.; Index 403-406p
ER  -