TY  - BOOK
AU  - Fischer Roland A Ed.
TI  - Precursor chemistry of advanced materials: CVD, ALD and nanoparticles
T2  - Topics in organometallic chemistry; 9
SN  - 3540016058 (hbd)
U1  - E5,8191, P5  TE 
PY  - 2005///
CY  - Berlin
PB  - Springer Verlag      
KW  -  Organometallic chemistry
KW  - Chemistry
N1  - Includes bibliographical references.; Index 211-213p
ER  -