Microsensors, MEMS, and smart devices - Gardner Julian W; Awadelkarim Osama O; Varadan Vijay K (Chichester John Wiley & Sons,Ltd, 2001)
Includes bibliographical references.; Appendix A-M, 445-491p.; Index 493-503p.
Keywords: Detectors; Electronic materials; Intelligent control systems; Microelectromechanical systems; Computer science