Brodie Ivor <br/><br/>
Physics of microfabrication 

 - New York   Plenum Press       1982 
 - xx, 502p.  cm. 
<br/><br/><label>Standard No.: </label>73628 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>D651, M2