TY  - BOOK
AU  - Ohring Milton
TI  - Material science of thin films: deposition and structure
SN  - 8131202798 (hbd)
U1  - C211-6:212;197, P2-;1 
PY  - 2002///
CY  - California
PB  - Academic Press      
KW  -  Material science
KW  -  Thin films
KW  - Physics
N1  - Includes bibliographical references.; Appendix p782.; Index 783-794p
ER  -