TY  - BOOK
AU  - Zahang Wendong
AU  -  Bao Haifei
AU  -  Chou Xiujian
AU  -  Ma Zongmin
AU  -  Shi Tielin
TI  - Measurement technology: for micro-nanometer devices
SN  - 9781118717967 (hbk)
U1  - C21:(D), Q7 
PY  - 2016///
CY  - Singapore
PB  - John wiley & sons    
N1  - Includes bibliographical references; Index 327-329p
ER  -