TY  - BOOK
AU  - Wilkening Gunter Ed.
AU  -  Koenders Ludger Ed.
TI  - Nanoscale calibration standards and methods: dimensional and related measurements in the micro and nanometer range
SN  - 352740502X (hbd)
U1  - C21:(D), P5 
PY  - 2005///
CY  - Weinheim
PB  - Wiley-Vch         
KW  -  Nanometer range
KW  -  Nanoscale
KW  -  Nanoscience
KW  - Nanoscience
N1  - Includes bibliographical references.; Index 515-519p
ER  -