TY  - BOOK
AU  - Lyshevski Sergey Edward
TI  - Nano- and micro-electomechanical systems: Fundamentals of nano- and microengineering
SN  - 9780367147570 (PBK)
U1  - C21:(D), P5-;4 
PY  - 2005///
CY  - Boca Raton 
PB  - CRC press     
KW  -  Classification and consideration
KW  -  Engineering and technology
KW  -  Microscale systems devices and structures
KW  - Physics
N1  - Index 705-722p.; Reprint 2019
ER  -