Lyshevski Sergey Edward <br/><br/>
Nano- and micro-electomechanical systems: Fundamentals of nano- and microengineering 

 - 2 
 - Boca Raton   CRC press       2005 
 - 722p. ill.  cm 
<br/><br/> Index 705-722p.; Reprint 2019. 
<br/><br/><label>ISBN: </label>9780367147570 (PBK) 
<br/><br/><label>Standard No.: </label>200454 
<br/><br/><label>Source: </label> 941, 12/02/2019, Satyam Books Pvt. Ltd.  Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Classification and consideration<br/> Engineering and technology<br/> Microscale systems devices and structures<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C21:(D), P5-;4