Dearnaley G <br/><br/>
Ion implantation 

 - London  North-Holland Publishing          1973 
 - xv, 802p.  cm. 
 - Series defects in crystal in solids .
<br/><br/><label>Standard No.: </label>37482 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Ion<br/>Plasma physics
<br/><br/><label>Dewey Class. No.: </label>C9B58, L3