Namba S Ed. <br/><br/>
Ion implatation in semi conductors 

 - New York       Plenum Press         1975 
 - xv, 742p.  cm. 
<br/><br/><label>Standard No.: </label>30613 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Dewey Class. No.: </label>D65,4,T, L5