May Gary S <br/><br/>
Fundamentals of semiconductor fabrication 

 - Hoboken John Wiley & Sons, Inc.  2004 
 - xiii,305p.  cm. 
<br/><br/> Includes bibliographical references.; Appendix A-L, 265-396p. 
<br/><br/><label>ISBN: </label>0471452386 (hbd) 
<br/><br/><label>Standard No.: </label>12579 
<br/><br/><label>Source: </label> 177, 20/09/2004, Ashutosh Technical Books  Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Semiconductor<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C6:212, P4