TY  - BOOK
AU  - May Gary S
AU  -  Sze Simon M
TI  - Fundamentals of semiconductor fabrication
SN  - 0471452386 (hbd)
U1  - C6:212, P4 
PY  - 2004///
CY  - Hoboken John Wiley & Sons, Inc.
KW  -  Semiconductor
KW  - Physics
N1  - Includes bibliographical references.; Appendix A-L, 265-396p
ER  -