Mayer James W <br/><br/>
Ion implantation in semiconductors: silicon and germanium 

 - New York       Academic Press         1970 
 - xiii, 280p.  cm. 
<br/><br/> Appendix A.1-A.4, 250254p. 
<br/><br/><label>Standard No.: </label>31521 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Dewey Class. No.: </label>D65,4,T, L0