TY  - BOOK
AU  - Frank Randy
AU  - Frank Randy
TI  - Understanding smart sensors
SN  - 9781608075072 (hbk)
U1  - C9B36, Q3 TC 
PY  - 2013///
CY  - Boston
PB  - Artech House      
KW  -  Micromachining
KW  -  Semiconductor sensor output
KW  -  Smart sensor basics
KW  - Physics
N1  - Include bibliographical refereces; Index 355-367p
ER  -