Roy Sunipa <br/><br/>
MEMS and nanotechnology for gas sensors 

 - Boca Raton   CRC Press       2016 
 - xvii, 224p. ill.  cm 
<br/><br/> Include references; Index 217-224p. 
<br/><br/><label>ISBN: </label>9781498700122 (hbk) 
<br/><br/><label>Standard No.: </label>200001 
<br/><br/><label>Source: </label> 5482, 12/03/2019, Ashutosh Technical Books  Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Photolithography<br/> Sensor interfaces<br/> Structuring mems<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C21:(D65), Q6