TY  - BOOK
AU  - Roy Sunipa
AU  -  Sarkar Chandan Kumar
TI  - MEMS and nanotechnology for gas sensors
SN  - 9781498700122 (hbk)
U1  - C21:(D65), Q6 
PY  - 2016///
CY  - Boca Raton 
PB  - CRC Press     
KW  -  Photolithography
KW  -  Sensor interfaces
KW  -  Structuring mems
KW  - Physics
N1  - Include references; Index 217-224p
ER  -